Infrater: task 1
Task 1: Expanding the capabilities of Clean Room–type infrastructure
Enabling the expansion of a measurement-services offer related to the creation of solutions for the photonics, energy and measurement-technology industries.
Under the scope of this task, the following device was purchased:
Heidelberg Instruments μMLA laser lithography system with CleanRoom
The device uses advanced maskless lithography technology, enabling precise exposure of various patterns on the surfaces of samples. Its light source operates at two wavelengths: 390 nm at an output power of 9 W and 375 nm at an output power of 70 mW, allowing flexible process adaptation to the user’s specific needs. A key feature is the positioning system with a resolution of 20 nm, ensuring high precision. The device supports substrates sized from 5 mm × 5 mm to 120 mm × 120 mm, with a maximum exposure area of 100 mm × 100 mm. The thickness of the photoresist layer can range from 0.1 μm to 12 μm, enabling work with a wide variety of materials.
The system offers two operating modes: raster mode and vector mode. Raster mode uses a built-in scanning system and exposes point by point, minimizing differences in exposure characteristics to less than 1 μm. Vector mode enables exposure of long, thin lines with the same precision as raster mode, significantly reducing process time. The device is installed in a CleanRoom room of ISO Class 5, which ensures appropriate environmental conditions for carrying out lithographic processes requiring extremely high cleanliness and minimal contamination.
Basic services:
- Fabrication of elements for applications in photonics
- Testing of photoresist substrates,
- Laboratory data storage service.
- Laboratory data storage service.
Price list
- The price for 1 hour of basic analyses performed on the equipment: 420 PLN. The price of more complex analyses is determined individually. The measurement time for most samples does not exceed one hour per preparation.
- A fixed fee of 332 PLN must be added to the analysis cost — for preparing a summary report.
If an extended report is required, the price is set individually. - It is possible to rent the device with an operator; in such a situation the hourly rate is reduced so that the cost of the operator is not added by Łukasiewicz – PORT (due to the need to protect the company’s trade secrets, information on the reduced rate is provided upon signing a confidentiality agreement).
- If the device is rented without an operator, basic training or specialist training by an operator designated by the client is required. Training conducted by Łukasiewicz – PORT:
• Cost of single specialist training: 2,800 PLN,
• Cost of three-day basic training: 2,800 PLN,
• Cost of three-day specialist training: 2,800 PLN. - If a client indicates their own operator, the designated operator must have suitable qualifications to operate the device; in such a case, training costs may be negotiated, provided the operator provides proof of training or work experience.
ZEPTTO plasma etching system
Plasma etching takes place in a special vacuum chamber made of borosilicate glass, which is resistant to high temperatures and chemicals. Inside the chamber, there is a cylinder with a diameter of 105 mm and a length of 300 mm, which is the central element enabling the effective distribution of plasma over the surface of the material being processed.
The etching process relies on the activation of gases such as oxygen (O₂) and argon (Ar₂), which are precisely dosed using two pneumatic needle valves. The gas flow is controlled by an MFC (Mass Flow Controller) valve, which allows accurate regulation of the amount of gas supplied to the chamber, ensuring stable and repeatable plasma reaction conditions.
The entire process takes place in an ISO 5 CleanRoom environment, which means that the number of contamination particles in the air is strictly controlled and does not exceed the standards. Such environmental control is essential to prevent contamination during etching, which could affect the quality of the surface processing. CleanRoom conditions minimize the risk of disruptions to the technological process caused by dust, organic particles, or other contaminants, which is crucial for achieving optimal results in precision applications such as the production of electronics, microstructures, or optical components.
Basic services:
- Plasma cleaning in an oxygen or argon plasma
- Laboratory data storage service.
Price list
- Price for 1 hour of performing basic processes on the equipment: 300 PLN/hour.
- An additional fee of 332 PLN is added for preparing the summary report.
- It is possible to rent the device with an operator; in such a situation the hourly rate is reduced so that the cost of the operator is not added by Łukasiewicz – PORT (due to the need to protect the company’s trade secrets, information on the reduced rate is provided upon signing a confidentiality agreement).
- If the device is rented without an operator, basic training or specialist training by an operator designated by the client is required. Training conducted by Łukasiewicz – PORT:
• Cost of single specialist training: 2,800 PLN,
• Cost of three-day basic training: 2,800 PLN,
• Cost of three-day specialist training: 2,800 PLN. - If a client indicates their own operator, the designated operator must have suitable qualifications to operate the device; in such a case, training costs may be negotiated, provided the operator provides proof of training or work experience.
Moorfield MiniLab 080
The vacuum system for layer deposition using the method of physical vapor deposition (PVD) utilizes material evaporation with the help of an electron beam, which allows for precise application of thin layers onto a substrate. The material source is a 6-pocket crucible, which enables sequential evaporation of different materials without the need to interrupt the process, increasing efficiency and process versatility. The electron beam melts the material in the crucible, causing its evaporation and deposition on the surface of the substrates. Thanks to the use of a vacuum chamber, the process takes place in controlled conditions, minimizing contamination and ensuring uniform coatings. The table on which the substrates are placed has a maximum diameter of 6 inches, and the table rotation speed reaches up to 20 revolutions per minute, enabling even layer deposition across the entire surface.
The system is equipped with a dual-quartz crystal microbalance, which monitors the amount of deposited material, allowing precise control of the thickness of the applied coatings. The quartz microbalance, operating automatically, can stop the process after achieving the desired thickness value, which significantly increases precision and repeatability of the applied layers. The entire device is located in a CleanRoom environment with ISO 5 cleanliness class, where air contamination is strictly controlled, which is crucial for the quality of the applied layers. Work in a clean environment with low particle contamination minimizes the risk of process disturbances and defects in the coatings, which is especially important in the production of electronic components, sensors, and other advanced structures.
Basic services:
- Deposition using technologies such as E-Beam, LTE, and electron beam.
- Deposition at controlled temperature.
- Possibility of depositing metals, dielectrics, and organic substrates.
- Laboratory data storage service.
Price list
- Price for performing one basic process on the equipment: 1,200.00 PLN.
The price of more complex processes will be estimated individually. - A fixed fee of 332 PLN must be added to the analysis cost — for preparing a summary report.
If an extended report is required, the price is set individually. - It is possible to rent the device with an operator; in such a situation the hourly rate is reduced so that the cost of the operator is not added by Łukasiewicz – PORT (due to the need to protect the company’s trade secrets, information on the reduced rate is provided upon signing a confidentiality agreement).
- If the device is rented without an operator, basic training or specialist training by an operator designated by the client is required. Training conducted by Łukasiewicz – PORT:
• Cost of single specialist training: 2,800 PLN,
• Cost of three-day basic training: 2,800 PLN,
• Cost of three-day specialist training: 2,800 PLN. - If a client indicates their own operator, the designated operator must have suitable qualifications to operate the device; in such a case, training costs may be negotiated, provided the operator provides proof of training or work experience.
Keyence VHX-7000
Inspection microscope with a navigation function that allows easy movement across the sample at any variable magnification, and enables automatic stacking of images with full depth of field. The device includes a one-button 3D model generation feature and an automatic focus-matching function. Software automatically counts up to 29,999 particles. Function for automatic 2D and 3D image stitching. Automatic lighting-angle adjustment allows visualization of surface irregularities. The device is installed in an ISO 5-class CleanRoom environment.
Basic services:
- Observation of the sample surface at any angle within a magnification range of 20–6000×,
- Particle counting,
- Mapping of 2D and 3D topology on a micrometer scale,
- Laboratory data storage service.
Price list
- Price for 1 hour of performing basic analyses on the equipment: 270 PLN/hour. The price for more complex processes will be quoted individually.
- A fixed fee of 332 PLN must be added to the analysis cost — for preparing a summary report.
If an extended report is required, the price is set individually. - It is possible to rent the device with an operator; in such a situation the hourly rate is reduced so that the cost of the operator is not added by Łukasiewicz – PORT (due to the need to protect the company’s trade secrets, information on the reduced rate is provided upon signing a confidentiality agreement).
- If the device is rented without an operator, basic training or specialist training by an operator designated by the client is required. Training conducted by Łukasiewicz – PORT:
• Cost of single specialist training: 2,800 PLN,
• Cost of three-day basic training: 2,800 PLN,
• Cost of three-day specialist training: 2,800 PLN. - If a client indicates their own operator, the designated operator must have suitable qualifications to operate the device; in such a case, training costs may be negotiated, provided the operator provides proof of training or work experience.
Heating Plate EMS 1200
The device for heating samples enables precise temperature control in the range of 50 to 230°C, with a setting accuracy of 1°C, which allows for optimal control of the thermal process. Temperature uniformity on the heating surface is within ±1%, ensuring even heating of samples, which is crucial in technological processes such as annealing, drying or material stabilization. Temperature stability is particularly important in thermally sensitive materials and modified polymers, where even minor thermal fluctuations can negatively affect samples sensitive to heat irregularities. The minimum dimensions of the heating surface are 230 × 230 mm, which enables work with samples of various shapes and sizes while maintaining the appropriate contact surface with the heating plate.
The device is equipped with a nitrogen chamber purge module, which allows oxygen to be removed from the chamber, eliminating the risk of sample oxidation during heating. The nitrogen atmosphere provides protection against unwanted chemical reactions and surface degradation of samples, which is essential in precise technological processes such as semiconductor fabrication or thin-film coatings. The device is installed in a CleanRoom environment of ISO Class 5, meaning that the number of airborne contaminants is strictly controlled. This significantly minimizes the risk of contamination during the heating process, which is crucial for maintaining high quality and reproducibility of results.
Basic services:
- Thermal processing of samples in a nitrogen atmosphere,
- Thermal processing of samples in an air atmosphere.
- Laboratory data storage service.
Price list
- Price for 1 hour of performing basic analyses on the equipment: 160 PLN. The price for more complex processes will be quoted individually.
- A fixed fee of 332 PLN must be added to the analysis cost — for preparing a summary report.
If an extended report is required, the price is set individually. - It is possible to rent the device with an operator; in such a situation the hourly rate is reduced so that the cost of the operator is not added by Łukasiewicz – PORT (due to the need to protect the company’s trade secrets, information on the reduced rate is provided upon signing a confidentiality agreement).
- In the case of renting the device without an operator, it is necessary for the client’s designated operator to complete basic training as well as specialist training. The training will be conducted by Łukasiewicz – PORT. The flat-rate cost of training for one operator is 2,800.00 PLN net for a three-day basic training course.
- If a client indicates their own operator, the designated operator must have suitable qualifications to operate the device; in such a case, training costs may be negotiated, provided the operator provides proof of training or work experience.
Spin-coater SPS SPIN 150i
The device for applying layers using the spin-coating method is equipped with an advanced rotation processor, which allows precise and repeatable processes related to coating, cleaning, drying, and depending on the model, etching substrates with a diameter of up to 160 mm. Thanks to the adjustable rotation speed in the range of 0 to 12,000 revolutions per minute (rpm) with an accuracy of up to 1 rpm, the device allows precise control of the layer thickness and uniformity of the applied coatings. The possibility of changing the direction of rotation (right – CW, left – CCW, and the pulsed mode, during which the sample is held on the surface) with an accuracy of ±0.1 rpm increases process flexibility, allowing for better adjustment of parameters to specific application requirements.
The device provides smooth acceleration and deceleration in the range of 1 to 30,000 rpm/s, enabling precise regulation of the dynamics of the spin-coating process. As a result, various materials can be evenly distributed on the substrate surface, regardless of their viscosity or thickness. High-accuracy acceleration or deceleration in steps of 1 rpm/s ensures repeatability and high quality of the applied layers. The entire system is installed in a CleanRoom environment with ISO 5 cleanliness class, minimizing the risk of contamination caused by airborne particles and thus ensuring optimal conditions for precise technological processes such as microelectronic device fabrication, chemical sensors, or optical components.
Basic services:
- Fabrication of layers using the spin-coating method.
- Laboratory data storage service.
Price list
- Price for 1 hour of performing basic processes on the equipment: 150 PLN.
The price of more complex processes will be estimated individually. - A fixed fee of 332 PLN must be added to the analysis cost — for preparing a summary report.
If an extended report is required, the price is set individually. - It is possible to rent the device with an operator; in such a situation the hourly rate is reduced so that the cost of the operator is not added by Łukasiewicz – PORT (due to the need to protect the company’s trade secrets, information on the reduced rate is provided upon signing a confidentiality agreement).
- In the case of renting the device without an operator, it is necessary for the client’s designated operator to complete basic training as well as specialist training. The training will be conducted by Łukasiewicz – PORT. The flat-rate cost of training for one operator is 2,800.00 PLN net for a three-day basic training course.
- If a client indicates their own operator, the designated operator must have suitable qualifications to operate the device; in such a case, training costs may be negotiated, provided the operator provides proof of training or work experience.
Ultrasonic Cleaner ElmaSonic P 30 H
The device is equipped with an ultrasonic tank made of special cavitation-resistant stainless steel and is designed for precise cleaning and processing of materials. Cavitation resistance means that the tank material is highly durable and resistant to damage caused by intensive ultrasonic waves and the formation of cavitation bubbles, which enhances the effectiveness and longevity of the device. The dual-frequency ultrasonic system allows adaptation of cleaning processes to specific needs. The 37 kHz frequency is ideal for thorough removal of contaminants such as mixing residues, precipitates, dispersions, and for degassing solvents. This type of operation is extremely useful in research laboratories as well as in industry, where precision in preparing materials and removing impurities is crucial.
The higher frequency of 80 kHz is dedicated to more demanding tasks, such as cleaning delicate structures (e.g., capillaries) that require a gentler method to avoid damage. In addition, this frequency generates significantly less noise, which makes the device suitable for use in environments that require “quiet operation,” such as laboratories and cleanrooms where minimizing noise increases comfort and concentration. The device can be used in a CleanRoom ISO Class 5 environment, ensuring that particulate contamination is strictly controlled. This is essential for processes requiring extremely high cleanliness, such as the production of microelectronics, micromechanical systems, or high-precision sensors.
Basic services:
- Ultrasonic cleaning at 37 kHz
- Ultrasonic cleaning at 80 kHz
- Laboratory data storage service.
Price list
- Price for 1 hour of performing basic processes on the equipment: 150 PLN.
The price of more complex processes will be estimated individually. - A fixed fee of 332 PLN must be added to the analysis cost — for preparing a summary report.
If an extended report is required, the price is set individually. - It is possible to rent the device with an operator; in such a situation the hourly rate is reduced so that the cost of the operator is not added by Łukasiewicz – PORT (due to the need to protect the company’s trade secrets, information on the reduced rate is provided upon signing a confidentiality agreement).
- In the case of renting the device without an operator, it is necessary for the client’s designated operator to complete basic training as well as specialist training. The training will be conducted by Łukasiewicz – PORT. The flat-rate cost of training for one operator is 2,800.00 PLN net for a three-day basic training course.
- If a client indicates their own operator, the designated operator must have suitable qualifications to operate the device; in such a case, training costs may be negotiated, provided the operator provides proof of training or work experience.
Sample Drying Oven Model FD 56
This specialized oven, operating in a temperature range from ambient temperature plus 10°C up to 300°C, is designed for precise thermal processes carried out under controlled conditions. The device utilizes the phenomenon of forced convection, meaning that hot air circulation inside the chamber is actively controlled, ensuring uniform heat distribution. As a result, the temperature inside the chamber is highly uniform, which is crucial in processes such as drying, annealing, stabilizing materials, or tempering, where precise temperature control without local hot or cold spots is essential. The use of forced convection also allows for faster achievement of the target temperature, increasing the operational efficiency of the oven. The oven is located in a CleanRoom environment with ISO 5 cleanliness classification, minimizing the risk of airborne contaminants—such as dust, mites, or organic microparticles—that could negatively impact the quality of processed materials. Such a clean environment allows the execution of highly precise processes required in the electronics, optics, and biotechnology industries.
Basic services:
- Thermal processing of samples.
- Laboratory data storage service.
Price list
- Price for 1 hour of performing basic processes on the equipment: 150 PLN.
The price of more complex processes will be estimated individually. - A fixed fee of 332 PLN must be added to the analysis cost — for preparing a summary report.
If an extended report is required, the price is set individually. - It is possible to rent the device with an operator; in such a situation the hourly rate is reduced so that the cost of the operator is not added by Łukasiewicz – PORT (due to the need to protect the company’s trade secrets, information on the reduced rate is provided upon signing a confidentiality agreement).
- In the case of renting the device without an operator, it is necessary for the client’s designated operator to complete basic training as well as specialist training. The training will be conducted by Łukasiewicz – PORT. The flat-rate cost of training for one operator is 2,800.00 PLN net for a three-day basic training course.
- If a client indicates their own operator, the designated operator must have suitable qualifications to operate the device; in such a case, training costs may be negotiated, provided the operator provides proof of training or work experience.
ATTENTION: In the case of renting multiple devices without an operator, located in the Clean Room, one basic training session will be conducted for the entire Clean Room, and specialized training sessions will be provided for each individual device.